products

providers

The Asys providers are enviromentally isolated modular logistic systems for SEMI- and microparts. They link process and metrology modules of any equipment manufacturer worldwide by standardized interfaces to a production center (transport module).

robots/systems/modules

- Vacuum- and clean room robots with
   a variety of arms and grippers.
- Vacuum Carousel (Buffer station
   inside the transport Module).
- Cassette modules (200 & 300mm)
- Shuttles with rail system,
   X- and Z-arrangement
- EFEM and LPM
- Assembly modules (i.e. for Sensor
   and MEMS Applications)
- 4 to 7 sided Cluster Handling Vacuum
   Transport Modules 200/300mm
- 200- and 300mm SMIF and FOUR
   EFEM
- Wafer sorter
- MEMS mask handling and assembly
   provider
- Automatic cassette handling provider