SEMI-provider

highvacuum

The architecture of the SEMI provider is equal to that used for space stations, the so-called Cluster Design. Vacuum chambers are connected via standardized mechanical interfaces. These interfaces are equipped with standard gate valves to separate the production module from the central transport module

Modules from semi-conductor equipment manufacturers can be combined very easily because the SEMI Interface Standards are followed. The isolation between modules is designed for high- and ultrahigh vacuum applications. For the material transport, robots and/or frame palettes are used.