ASYS GmbH + Co. KG, Schorndorf approved in challenges
cluster tool platforms, robots, vacuum handling, microsystems

SEMI-provider

transport modules
The ASYS transport module consists of the ASYS x-flange (x-sided) chamber, the ASYS-base frame, the ASYS vacuum robot and slot valves. The wafers or substrates are transfered by the ASYS vacuum robot from the ASYS load lock to the connected process chambers and back under special customer-specified environments.
robot, transportmodule chamber, aligner, slot valve (flange), base frame, vacuum assembly
transportmodules: robots transportmodules: transport module chambers transportmodules: cassette module
transportmodules: aligners
transportmodules: slot valves
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