transportmodules

The ASYS 7-flange chamber is made of alumnium with opening cover and sensoric for wafer or substrate recognition (optional). The ASYS 7-flange chamber is for wafers up to 300mm and substrates of 8 inch (203mm) sq. For opening the cover, a two hand operation, incl. two electric switches and pneumatic lift is being used, which is mounted on the mounting plate in the base frame.